论文信息 - Development of Low Dark Current SiGe Near-Infrared PIN Photodetectors on 300 mm Silicon Wafers - 字舞流文

Development of Low Dark Current SiGe Near-Infrared PIN Photodetectors on 300 mm Silicon Wafers

A. Sood | H. Efstathiadis | J. Zeller | P. Wijewarnasuriya | N. Dhar | P. Haldar | Y. R. Puri | Jay S. Lewis | C. Rouse