Diffraction gratings (manufacture)

Recent progress in the techniques of manufacture of spectroscopic diffraction gratings is described. Three main topics are discussed in detail; (i) the mechanical ruling of gratings, and the way in which the mechanical aspects of the ruling process affect the spectroscopic performance of the grating; (ii) the development of interference (or 'holographic') techniques for manufacturing gratings, and the relationship between ruled gratings and those made interferometrically; (iii) X-ray gratings for use at grazing incidence, and the different criteria that arise through the use of gratings in this way. The review was completed in April 1975.

[1]  D. Maystre Sur la diffraction d'une onde plane electromagnetique par un reseau metallique , 1973 .

[2]  P. Beckmann,et al.  The scattering of electromagnetic waves from rough surfaces , 1963 .

[3]  K. Lindsey,et al.  A simple ruling engine for X-ray gratings , 1968 .

[4]  G R Harrison,et al.  The diffraction grating-an opinionated appraisal. , 1973, Applied optics.

[5]  George R. Harrison,et al.  Large diffraction gratings ruled on a commercial measuring machine controlled interferometrically , 1970 .

[6]  C. H. Palmer,et al.  Grating Anomalies as a Local Phenomenon , 1968 .

[7]  D A Davies,et al.  Diffraction grating ruling in australia. , 1969, Applied optics.

[8]  R. Petit,et al.  Contribution a l'etude theorique de l'influence d'une couche dielectrique sur l'efficacite d'un reseau infiniment conducteur , 1972 .

[9]  R. Petit,et al.  Application des lois de l'électromagnétisme, à l'étude des réseaux , 1972 .

[10]  George R. Harrison,et al.  Ruling of Large Diffraction Gratings with Interferometric Control , 1957 .

[11]  R. H. Ritchie,et al.  Surface-Plasmon Resonance Effect in Grating Diffraction , 1968 .

[12]  James J. Cowan,et al.  Dispersion of surface plasmons in dielectric-metal coatings on concave diffraction gratings , 1970 .

[13]  M. D. Waterworth,et al.  Profile formation in holographic diffraction gratings , 1973 .

[14]  Asymmetry in the Diffraction Pattern of a Grating Due to Periodic Errors , 1970 .

[15]  James E. Stewart,et al.  Diffraction Anomalies in Grating Spectrophotometers , 1962 .

[16]  D. W. Butler A stereo electron microscope technique for microtopographic measurements , 1973 .

[17]  R. McPhedran,et al.  Blaze optimization for sinusoidal profile gratings , 1973 .

[18]  A. H. Compton,et al.  X-Ray Spectra from a Ruled Reflection Grating. , 1925, Proceedings of the National Academy of Sciences of the United States of America.

[19]  Horace W. Babcock,et al.  Control of a Ruling Engine by a Modulated Interferometer , 1962 .

[20]  R. McPhedran,et al.  Blaze Optimization for Triangular Profile Gratings , 1973 .

[21]  J. Verrill Use of the Talystep in investigating diffraction grating groove profiles , 1973 .

[22]  R. McPhedran,et al.  A Theoretical Demonstration of Properties of Grating Anomalies (S-polarization) , 1972 .

[23]  S. Porto,et al.  A Tandem Spectrometer to Detect Laser-Excited Raman Radiation , 1965 .

[24]  C. H. Palmer,et al.  Parallel diffraction grating anomalies , 1952 .

[25]  T Zehnpfennig,et al.  A functioning model of the Soft X-ray slitless spectrometer. , 1966, Applied optics.

[26]  George R. Harrison,et al.  Interferometric Control of Grating Ruling with Continuous Carriage Advance , 1955 .

[27]  R. Deleuil Réalisation et Utilisation D'un Appareillage Destiné à l'étude des Dioptres Irréguliers et des Réseaux en Ondes Millimétriques , 1969 .

[28]  D. Crompton,et al.  The wear of diamond , 1973, Proceedings of the Royal Society of London. A. Mathematical and Physical Sciences.

[29]  Nicholas K. Sheridon,et al.  PRODUCTION OF BLAZED HOLOGRAMS , 1968 .

[30]  Lord Rayleigh F.R.S. LVI. Investigations in optics, with special reference to the spectroscope , 1879 .

[31]  D. Tomboulian,et al.  Calculations of Grating Efficiency in the Soft X-Ray Region* , 1955 .

[32]  Lowell Rosen,et al.  Focusing hologram diffraction grating. , 1967 .

[33]  Edward A. Stern,et al.  Plasma Radiation from Metal Grating Surfaces , 1967 .

[34]  E. Arakawa,et al.  Dispersion of surface plasmons in multiple metal and dielectric layers on concave diffraction gratings , 1970 .

[35]  D. Maystre,et al.  Sur la diffraction d'une onde plane par un reseau metallique de conductivite finie , 1972 .

[36]  J. Bennett,et al.  Infrared Reflectance and Emittance of Silver and Gold Evaporated in Ultrahigh Vacuum , 1965 .

[37]  C. H. Cartwright Laminary reflection gratings for infrared investigation , 1931 .

[38]  M. V. R. K. Murty,et al.  Spherical zone-plate diffraction grating , 1960 .

[39]  R. Petit Electromagnetic grating theories: Limitations and successes , 1975 .

[40]  Charles V. Shank,et al.  Optical technique for producing 0.1‐μ periodic surface structures , 1973 .

[41]  H. Haber,et al.  The Torus Grating , 1950 .

[42]  F. Ursell On the rigorous foundation of short-wave asymptotics , 1966, Mathematical Proceedings of the Cambridge Philosophical Society.

[43]  M. D. Waterworth,et al.  Properties of Diffraction Grating Anomalies , 1973 .

[44]  H. Rowland XXXIX. Gratings in theory and practice , 1893 .

[45]  George W. Stroke,et al.  Interferometric Measurement of Wave-Front Aberrations in Gratings and Echelles* , 1955 .

[46]  John Strong,et al.  New Johns Hopkins Ruling Engine , 1951 .

[47]  Claus Müller,et al.  Foundations of the mathematical theory of electromagnetic waves , 1969 .

[48]  L. Sayce,et al.  N. P. L. gratings for X-ray spectroscopy , 1964, Proceedings of the Royal Society of London. Series A, Mathematical and physical sciences.

[49]  W. Hayes Spectroscopy with a synchrotron light source , 1972 .

[50]  A. A. Oliner,et al.  A New Theory of Wood’s Anomalies on Optical Gratings , 1965 .

[51]  F. P. Bowden,et al.  The friction of solids at very high speeds I. Metal on metal; II. Metal on diamond , 1958, Proceedings of the Royal Society of London. Series A. Mathematical and Physical Sciences.

[52]  P. Osborne,et al.  A focusing x-ray spectrograph for use in the range 0·5-50 Å , 1970 .

[53]  W. T. Welford,et al.  Optical Instruments and Techniques , 1969 .

[54]  Preparation of phase diffraction gratings by vacuum evaporation , 1960 .

[55]  R. Learner Spectrograph design, 1918-68. , 1968, Journal of scientific instruments.

[56]  J. Strong Effect of Evaporated Films on Energy Distribution in Grating Spectra , 1936 .

[57]  K. H. Hellwege über rasterförmige Reflexionsgitter , 1937 .

[58]  R. W. Wood,et al.  XXVII. Diffraction gratings with controlled groove form and abnormal distribution of intensity , 1912 .

[59]  R. W. Wood,et al.  Anomalous Diffraction Gratings , 1935 .

[60]  W. R. Horsfield Ruling Engine with Hydraulic Drive , 1965 .

[61]  P. Jacquinot The luminosity of spectrometers with prisms, gratings, or Fabry-Perot etalons (Journal of the Optical Society of America 1954) , 1954 .

[62]  C. Mooney,et al.  Electron Microscope Method for Measuring Diffraction Grating Groove Geometry , 1965 .

[63]  N. U. Mayall Kitt Peak National Observatory , 1964 .

[64]  W. Liller High dispersion stellar spectroscopy with an echelle grating. , 1970, Applied optics.

[65]  Antoine Labeyrie,et al.  Spectrographic performance of holographically made diffraction gratings , 1969 .

[66]  I R Bartlett,et al.  Diffraction grating ruling engine with piezoelectric drive. , 1975, Applied optics.

[67]  N. George,et al.  Holographic diffraction gratings , 1966 .

[68]  R. J. Anstead,et al.  Deterioration of vacuum ultraviolet reflecting surfaces by the formation of intermetallic compounds. , 1971, Applied optics.

[69]  J. Strong Evaporation Technique for Aluminum , 1933 .

[70]  G. W. Stroke,et al.  Some New Advances in Grating Ruling, Replication, and Testing , 1964 .

[71]  P. M. van den Berg,et al.  Diffraction theory of a reflection grating , 1971 .

[72]  R. J. Speer,et al.  The theory, manufacture, structure and performance of n.p.l. x-ray gratings , 1975, Philosophical Transactions of the Royal Society of London. Series A, Mathematical and Physical Sciences.

[73]  T. H. Osgood X-Ray Spectra of Long Wave-Length , 1927 .

[74]  L. Rayleigh III. Note on the remarkable case of diffraction spectra described by Prof. Wood , 1907 .

[75]  M. Hutley Blazed Interference Diffraction Gratings for the Ultra-violet , 1975 .

[76]  M. Beesley,et al.  The use of photoresist as a holographic recording medium. , 1970, Applied optics.

[77]  George R. Harrison,et al.  The Production of Diffraction Gratings: II. The Design of Echelle Gratings and Spectrographs1 , 1949 .

[78]  H. A. Kalhor,et al.  Numerical Method for the Analysis of Diffraction Gratings , 1971 .

[79]  F. Sellberg,et al.  Reflection Absorption, and Emission of Light by Opaque Optical Gratings , 1966 .

[80]  J. B. Nicholson,et al.  The Effect of Grating Blaze Angle on the Diffraction Efficiency of Ultrasoft X-Ray Radiation , 1964 .

[81]  H. Kogelnik,et al.  Bragg Diffraction in Hologram Gratings with Multiple Internal Reflections , 1967 .

[82]  L. G. Parratt Surface Studies of Solids by Total Reflection of X-Rays , 1954 .

[83]  R. L. Johnson,et al.  Holographically formed grazing-incidence reflection grating with stigmatic soft x-ray focal isolation. , 1974, Applied optics.

[84]  Erwin G. Loewen,et al.  Diffraction gratings for spectroscopy , 1970 .

[85]  J F Verrill,et al.  Diffraction grating ruling tool alignment by analysis of traced groove profile , 1975 .

[86]  A. H. Compton,et al.  CXVII. The total reflexion of X-rays , 1923 .

[87]  W. Moore,et al.  Foundations of mechanical accuracy , 1970 .

[88]  T. Harada,et al.  Mechanically Ruled Stigmatic Concave Gratings , 1975 .

[89]  W. Hirst,et al.  The indentation of materials by wedges , 1969, Proceedings of the Royal Society of London. A. Mathematical and Physical Sciences.

[90]  George R. Harrison,et al.  750-mm Ruling Engine Producing Large Gratings and Echelles* , 1972 .

[91]  A. Maréchal La Diffusion Résiduelle des Surfaces Polies et des Réseaux , 1958 .

[92]  H. Babcock,et al.  The Ruling of Diffraction Gratings at the Mount Wilson Observatory , 1951 .

[93]  F. M. Siegbahn Studies in the extreme ultraviolet and the very soft X-ray region , 1933 .

[94]  R. W. Wood,et al.  LXXXV. The echelette grating for the infra-red , 1910 .

[95]  William C. Meecham,et al.  Variational Method for the Calculation of the Distribution of Energy Reflected from a Periodic Surface. I. , 1956 .

[96]  M. Pluta An Experimental Study of the Anomalies of Sinusoidal Diffraction Gratings , 1973 .

[97]  P. Clemmow,et al.  The plane wave spectrum representation of electromagnetic fields , 1966 .

[98]  R. G. N. Hall,et al.  On the production of diffraction gratings II. The generation of helical rulings and the preparation of plane gratings therefrom , 1952, Proceedings of the Royal Society of London. Series A. Mathematical and Physical Sciences.

[99]  George P. Schmahl,et al.  High precision gratings produced with laserlight and photoresist layers. , 1970 .

[100]  On the free energy of crystal surfaces. I. The configurational free energy of low-index surfaces by the Monte Carlo method , 1973 .

[101]  R. McPhedran,et al.  A Detailed Theoretical Study of the Anomalies of a Sinusoidal Diffraction Grating , 1974 .

[102]  A. E. Gee,et al.  A Piezo-Stepping Diffraction Grating Ruling Engine with Continuous Grating-Blank Position Control : Diffiraction Gratings , 1975 .

[103]  B. Gale The Theory of Variable Spacing Gratings , 1966 .

[104]  G. Schmahl,et al.  High precision gratings holographically made with reconstructed identical wavenfronts. , 1970 .

[105]  J. Bennett Observation and measurement of surface relief of diffraction gratings using electron microscopy techniques , 1969 .

[106]  J.-F. Bousquet,et al.  Diffraction par un Rseau Conducteur Nouvelle Mthode de Rsolution , 1970 .

[107]  P. Bousquet,et al.  Nouveau procédé d'observation du profil et de l'éetat des surfaces par microscopie électronique; applications à l'optique. , 1969, Applied optics.

[108]  C. Darwin XXXIV. The theory of X-ray reflexion , 1914 .

[109]  G. Pieuchard,et al.  Réseaux classiques - réseaux holographiques: Les questions d'efficacité et leurs conséquences en spectroscopie instrumentale , 1970 .

[110]  S. Šesnić,et al.  Diffraction of a Parallel- and Perpendicular-Polarized Wave from an Echelette Grating* , 1972 .

[111]  A. Rigler,et al.  On some properties of photographically produced diffraction gratings. , 1966, Applied optics.