A MICROMACHINED GEOMETRIC MOIRÉ INTERFEROMETRIC FLOATING-ELEMENT SHEAR STRESS SENSOR

This paper presents the development of a floating-element shear stress sensor that permits the direct measurement of skin friction based on geometric Moire interferometry. The sensor was fabricated using an aligned waferbond/thin-back process producing optical gratings on the backside of a floating element and on the top surface of the support wafer. Experimental characterization indicates a static sensitivity of 0.26 µm/Pa, a resonant frequency of 1.7 kHz, and a noise floor of 6.2 mPa/√Hz.

[1]  Mark Sheplak,et al.  Dynamic calibration of a shear-stress sensor using Stokes-layer excitation , 2001 .

[2]  D. M. Bushnell,et al.  An overview of concepts for aircraft drag reductions , 1977 .

[3]  Louis N. Cattafesta,et al.  Characterization of a Silicon-Micromachined Thermal Shear-Stress Sensor , 2002 .

[4]  P. Ifju,et al.  High Sensitivity Moiré: Experimental Analysis for Mechanics and Materials , 1995 .

[5]  T. Gabrielson.  Mechanical-thermal noise in micromachined acoustic and vibration sensors , 1993 .

[6]  R. Howe,et al.  Design and calibration of a microfabricated floating-element shear-stress sensor , 1988 .

[7]  Mohamed Gad-el-Hak,et al.  Flow Control: The Future , 2001 .

[8]  M. Grigioni.  The Role of Wall Shear Stress in Unsteady Vascular Dynamics , 2022 .

[9]  M. Madou.  Fundamentals of microfabrication , 1997 .

[10]  Mory Gharib,et al.  Miniature and MOEMS Flow Sensors , 2001 .

[11]  Kay-Yip Ng,et al.  A liquid-shear-stress sensor using wafer-bonding technology , 1990 .

[12]  Chih-Ming Ho,et al.  A micromachined flow shear-stress sensor based on thermal transfer principles , 1999 .

[13]  K. R. Farmer,et al.  A MEMS device for measurement of skin friction with capacitive sensing , 2001, 2001 Microelectromechanical Systems Conference (Cat. No. 01EX521).

[14]  D. Ku.  BLOOD FLOW IN ARTERIES , 1997 .

[15]  Tao Pan,et al.  Microfabricated Shear Stress Sensors, Part 1: Design and Fabrication , 1999 .

[16]  Mark Sheplak,et al.  Modern developments in shear-stress measurement ☆ , 2002 .

[17]  K. Winter.  An outline of the techniques available for the measurement of skin friction in turbulent boundary layers , 1979 .

[18]  Wei Shyy,et al.  MIXED CONVECTION INDUCED BY MEMS-BASED THERMAL SHEAR STRESS SENSORS , 2003 .

[19]  H. H. Fernholz,et al.  New developments and applications of skin-friction measuring techniques , 1996 .

[20]  Martin A. Schmidt,et al.  A wafer-bonded floating-element shear stress microsensor with optical position sensing by photodiodes , 1996 .

[21]  Martin A. Schmidt,et al.  A microfabricated floating-element shear stress sensor using wafer-bonding technology , 1992 .

[22]  Joseph H. Haritonidis,et al.  The Measurement of Wall Shear Stress , 1989 .