Survey Of Surface Roughness Properties Of Synchrotron Radiation Optics

Measurements of surface roughness were made on a large number of grazing incidence mirrors delivered for use at the National Synchrotron Light Source (NSLS) at Brookhaven National Laboratory. The measurements were made with a WYKO optical profiler using a 2.5X and a 10X objective and analyzed with our PROFILE code to generate an average periodogram representation for each surface. The data is presented in the form of representative profiles with all of the periodogram curves arranged according to figure type. Analysis of the periodograms allows one to compute bandwidth-limited values for RMS roughness and slope, to provide valuable feedback information to manufacturers regarding compliance with specifications, and to predict the performance of the optic at x-ray wavelengths.