论文信息 - Estimation of Uncertainty in Feature Based Metrology (3rd Report) - 字舞流文

Estimation of Uncertainty in Feature Based Metrology (3rd Report)

直線形体の持つ形状偏差により生じる系統誤差は, 測定の不確かさの未知の系統効果となる. 本論文では, 形状偏差を区分多項式を利用してモデル化し, パラメータを最小二乗法により, 求める方法を定式化した. さらに, モデル選択の評価基準を提案した. また, 直線形体モデルの信頼性を評価する手法を定式化した.

Kiyoshi Takamasu | Shigeo Ozono | Ryoshu Furutani | Makoto Abbe

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