论文信息 - Composition dependence of interface control and optimization on the performance of an HfTiON gate dielectric metal-oxide-semiconductor capacitor - 字舞流文

Composition dependence of interface control and optimization on the performance of an HfTiON gate dielectric metal-oxide-semiconductor capacitor

Y. M. Liu | X. Chen | Y. Ma | L. Zhang | Z. Q. Sun | G. He | M. Wu | S. Shi | G. Li | Z. Fang