论文信息 - Epitaxial growth of TiN on (0001) semi-insulating 4H-SiC substrate by reactive sputtering - 字舞流文

Epitaxial growth of TiN on (0001) semi-insulating 4H-SiC substrate by reactive sputtering

C. Ko | Kun-An Chiu | P. Wu | Li Chang | Wei-Chia Chen | Jing Lin | K. Lin | Hsueh-I Chen | Chun-Hua Chen