论文信息 - Influence of different anneal processes on copper surfaces pre - and post - CMP - 字舞流文

Influence of different anneal processes on copper surfaces pre - and post - CMP

Irene Bartusseck | M. J. Wolf | Catharina Rudolph | Mathias Boettcher | Holger Wachsmuth | S. Dobritz | Juergen Grafe