WR1.5 Silicon Micromachined Waveguide Components and Active Circuit Integration Methodology

This paper describes the development of silicon micromachined waveguide structures operating in the WR1.5 waveguide band (500-750 GHz). Average waveguide loss of 0.15 dB/mm was measured at 600 GHz. Capabilities of the proposed approach have been shown with the development of a 570-GHz three-pole waveguide bandpass filter that has a 0.9-dB passband loss and a Y-junction coupler operating at 670 GHz. These components have been tested using a novel on-wafer testing method for rapid characterization throughput. A batch process approach for integration of solid-state devices and micromachined waveguide components has also been developed. Further development of this technology will lead to the next generation of terahertz-frequency wafer-level packaging of active circuits.

[1]  L. Katehi,et al.  Performance of silicon micromachined waveguide at W-band , 2002 .

[2]  Y. Tai,et al.  Silicon micromachined waveguides for millimeter-wave and submillimeter-wave frequencies , 1993, IEEE Microwave and Guided Wave Letters.

[3]  W. Deal,et al.  Low Noise Amplification at 0.67 THz Using 30 nm InP HEMTs , 2011, IEEE Microwave and Wireless Components Letters.

[4]  W. Deal,et al.  Solid-state amplifiers for terahertz electronics , 2010, 2010 IEEE MTT-S International Microwave Symposium.

[5]  Xiaoyu Mi,et al.  A multi-step DRIE process for a 128 /spl times/ 128 micromirror array , 2003, 2003 IEEE/LEOS International Conference on Optical MEMS (Cat. No.03EX682).

[6]  M. Lancaster,et al.  A micromachined WR-3 waveguide with embedded bends for direct flange connections , 2010, The 40th European Microwave Conference.

[7]  J. Papapolymerou,et al.  Silicon Micromachined Multiplier Utilizing Heterostructure Barrier Varactor Diode , 2007, 2007 IEEE/MTT-S International Microwave Symposium.

[8]  I. Mehdi,et al.  Silicon micromachining technology for THz applications , 2010, 35th International Conference on Infrared, Millimeter, and Terahertz Waves.

[9]  I. Mehdi,et al.  Characterization of micromachined silicon rectangular waveguide at 400 GHz , 2006, IEEE Microwave and Wireless Components Letters.

[10]  S. Ramo,et al.  Fields and Waves in Communication Electronics , 1966 .

[11]  N. Scott Barker,et al.  Development of a Multi-layer SU-8 Process for Terahertz Frequency Waveguide Blocks , 2005, IEEE MTT-S International Microwave Symposium Digest, 2005..