An ultraprecision stage for alignment of wafers in advanced microlithography
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[1] Akira Inagaki,et al. Ultra precision wafer positioning by six-axis micro-motion mechanism , 1990 .
[2] Tore Hägglund,et al. Automatic Tuning of Pid Controllers , 1988 .
[3] F. Omata,et al. A vertical x-ray stepper for SOR lithography. , 1991 .
[4] Akira Shimokohbe,et al. A six-degrees of freedom fine motion mechanism , 1989 .
[5] Katsunobu Ueda,et al. Experimental studies on ultra-precision positioning. An inchworm movement method using fine and coarse positionings , 1991 .
[6] Stefan Wittekoek,et al. Deep-UV wafer stepper with through-the-lens wafer to reticle alignment , 1990, Advanced Lithography.