论文信息 - Integrated tunable optical interferometer obtained using <111> oriented silicon micromachining

Integrated tunable optical interferometer obtained using <111> oriented silicon micromachining

The paper presents the design and the experiments performed for integration of a micromechanical voltage tunable Fabry-Perot interferometer structure with a silicon p-n photodiode in order to obtain a tunable optical sensor. In our approach, the top mirror of the Fabry-Perot cavity is an Au/SiO/sub 2/ movable membrane, formed by anisotropic etching of <111>-oriented Si wafers. The air-silicon surface acts as the lower mirror. To improve the bottom mirror reflectivity, an An layer can be deposited by electroplating. The upper movable mirror can be electrostatically actuated. This Fabry-Perot interferometer was realized on the top of a p-n photodiode.

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