论文信息 - W-band RF MEMS double and triple-stub impedance tuners

W-band RF MEMS double and triple-stub impedance tuners

Reconfigurable integrated impedance tuners have been developed for W-band on-wafer noise parameter and load-pull measurement applications. The impedance tuners are based on double and triple-stub topologies and employ 11 switched MEMS capacitors producing 2048 (2/sup 11/) different impedances. Measured |/spl Gamma//sub MAX/| for the double-stub tuner is 0.92 and 0.82 at 75 and 100 GHz from 110 measurements out of 2048 possible impedances, and 0.92 and 0.83 for the triple-stub tuner. To our knowledge, this represents the first W-band integrated impedance tuner to date.

G.M. Rebeiz | J. Varis | T. Vaha-Heikkila | J. Tuovinen

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