Aerosol Deposition of Ceramic Thick Films at Room Temperature: Densification Mechanism of Ceramic Layers

A novel method for depositing ceramic thick films by aerosol deposition (AD) is presented. Submicron ceramics particles are accelerated by gas flow up to 100–500 m/s and then impacted on a substrate, to form a dense, uniform and hard ceramic layer at room temperature. However, actual deposition mechanism has not been clarified yet. To clarify densification mechanism during AD, a mixed aerosol of α-Al2O3 and Pb(Zr, Ti)O3 powder was deposited to form a composite layer in this study. The cross-section of the layer was observed by HR-TEM to investigate the densification and bonding mechanism of ceramic particles. As a result, a plastic deformation of starting ceramic particles at room temperature was observed.

[1]  Jun Akedo,et al.  Microstructure and Electrical Properties of Lead Zirconate Titanate (Pb(Zr52/Ti48)O3) Thick Films Deposited by Aerosol Deposition Method , 1999 .

[2]  Jun Akedo,et al.  Powder Preparation in Aerosol Deposition Method for Lead Zirconate Titanate Thick Films , 2002 .

[3]  Jun Akedo,et al.  Aerosol Deposition Method for Fabrication of Nano Crystal Ceramic Layer , 2004 .

[4]  J. Petrovic,et al.  Explosive shock loading of alpha-Si3N4 powder , 1985 .

[5]  Shizuka Nakano,et al.  Compression test system for a single submicrometer particle , 2005 .

[6]  Jun Akedo,et al.  Simple self-selective method of velocity measurement for particles in impact-based deposition , 2000 .

[7]  K. Kondo,et al.  Shock-compacted Si[sub 3]N[sub 4] nanocrystalline ceramics: Mechanisms of consolidation and of transition from [alpha]- to [beta]-form , 1994 .

[8]  J. Akedo,et al.  Nanostructuring by Shock Compaction with Fine Particle Beam , 2003 .

[9]  J. Akedo,et al.  Ceramic dielectric film for microwave filter deposited at room temperature , 2005 .

[10]  Harumichi Sato,et al.  High-Speed Optical Microscanner Driven with Resonation of Lam Waves Using Pb(Zr,Ti)O3 Thick Films Formed by Aerosol Deposition , 2005 .

[11]  G. R. Johnson,et al.  High strain rate properties and constitutive modeling of glass , 1995 .

[12]  J. Akedo,et al.  Influence of Carrier Gas Conditions on Electrical and Optical Properties of Pb(Zr, Ti)O3 Thin Films Prepared by Aerosol Deposition Method , 2001 .

[13]  K. Ohashi,et al.  Electro-Optic Properties of Pb(Zr1-xTix)O3 (X=0, 0.3, 0.6) Films Prepared by Aerosol Deposition , 2005 .

[14]  Jun Akedo,et al.  Alumina Thick Films as Integral Substrates Using Aerosol Deposition Method , 2004 .

[15]  Jun Akedo,et al.  Piezoelectric properties and poling effect of Pb(Zr, Ti)O3 thick films prepared for microactuators by aerosol deposition , 2000 .

[16]  J. Akedo,et al.  Magnetic properties of Fe/(NiZnCu)Fe/sub 2/O/sub 4/ composite films prepared by aerosoldeposition method , 2005, IEEE Transactions on Magnetics.