Screen-printed piezoelectric ceramic thick films with sintering additives introduced through a liquid-phase approach

Abstract Lead zirconate titanate (PZT) ceramic films, 30 μm thick, were deposited onto Pt-coated silicon wafers by a screen-printing process. A chemical liquid-phase doping method was used to introduce sintering aids with improved homogeneity in the PZT thick films. Porous thick films with good adhesion were formed on the substrates after heating at a temperature of 925 °C. The morphology, dielectric, ferroelectric and piezoelectric properties of the thick films were characterized. Stable out-of-plane piezoelectric vibration of the thick films was observed with a laser scanning vibrometer (LSV), and the piezoelectric dilatation magnitude was determined accordingly. The effective longitudinal piezoelectric coefficient d 33 was evaluated according to numerical simulations with the elastic clamping of the substrate taken into account. High piezoelectric voltage constants were obtained due to the very low dielectric constant of the porous thick films. These films have application potential as integrated piezoelectric sensors.

[1]  Nava Setter,et al.  Interferometric measurements of electric field-induced displacements in piezoelectric thin films , 1996 .

[2]  S. Beeby,et al.  Processing of PZT piezoelectric thick films on silicon for microelectromechancial systems , 1999 .

[3]  D. Marioli,et al.  Multisensor array of mass microbalances for chemical detection based on resonant piezo-layers of screen-printed PZT , 2000 .

[4]  Jun-Ming Liu,et al.  Piezoelectric coefficient measurement of piezoelectric thin films: an overview , 2002 .

[5]  Arthur Brunnschweiler,et al.  The dynamic micropump driven with a screen printed PZT actuator , 1998 .

[6]  Kui Yao,et al.  Characterisation of piezoelectric thin films by areal laser scanning , 2004 .

[7]  Daniele Marioli,et al.  3 × 3 matrix of thick-film pyroelectric transducers , 1998 .

[8]  Kui Yao,et al.  Improved preparation procedure and properties for a multilayer piezoelectric thick-film actuator , 1998 .

[9]  S. Beeby,et al.  Thick-film PZT-silicon micromechanical resonator , 2000 .

[10]  Kui Yao,et al.  Controlled Crystallization in Lead Zirconate Titanate Glass‐Ceramics Prepared by the Sol‐Gel Process , 2005 .

[11]  Kui Yao,et al.  Measurement of longitudinal piezoelectric coefficient of thin films by a laser-scanning vibrometer , 2003, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[12]  Nancy R. Sottos,et al.  Effects of thickness on the piezoelectric and dielectric properties of lead zirconate titanate thin films , 2000 .

[13]  Jonathan J. Bernstein,et al.  Dielectric, ferroelectric, and piezoelectric properties of lead zirconate titanate thick films on silicon substrates , 1995 .

[14]  Neil M. White,et al.  Thick film PZT/micromachined silicon accelerometer , 1999 .

[15]  Maria Prudenziati,et al.  Resonant pressure sensor based on piezoelectric properties of ferroelectric thick films , 1992 .

[16]  M. J. Haun,et al.  Ferroelectric thick-films for piezoelectric applications , 1994 .

[17]  Dragan Damjanovic,et al.  Processing and Properties of Screen-Printed Lead Zirconate Titanate Piezoelectric Thick Films on Electroded Silicon , 2001 .

[18]  S. Beeby,et al.  A novel thick-film piezoelectric micro-generator , 2001 .

[19]  W. D. Kingery,et al.  Introduction to Ceramics , 1976 .