Understanding dielectric breakdown and related tool wear characteristics in nanoscale electro-machining process

Abstract To address the need to produce sub-50 nm scale features for manufacturing of nano/bio devices and systems, a nanoscale electro-machining (nano-EM) process is being studied. This paper reports unique field induced effects on a tungsten tool. During machining, the tungsten atoms leave the active tool tip in the form of clusters. Upon machining, the tool tip end radius was sharper (∼20 nm after in comparison with ∼35 nm before). The tool surface was chemically modified to a nanocrystalline matrix of tungsten oxide and tungsten carbide. The tool sharpening and the formation of the nanocrystalline matrix are expected to prolong the tool life in the nano-EM process in a manufacturing environment.

[1]  Naotake Mohri,et al.  Time-resolved observation of the change of electrode shape in single discharge: Rapid self-forming of a thin electrode , 2005 .

[2]  K. Virwani,et al.  Current displacement (I-Z) spectroscopy-based characterization of nanoscale electro machining (nano-EM) tools , 2006 .

[3]  G. Kellogg.  Measurement of activation energies for field evaporation of tungsten ions as a function of electric field , 1984 .

[4]  Jun Chen,et al.  Growth and field-emission property of tungsten oxide nanotip arrays , 2005 .

[5]  J. S. Beck,et al.  Ordered mesoporous molecular sieves synthesized by a liquid-crystal template mechanism , 1992, Nature.

[6]  U. Landman,et al.  Formation, stability, and breakup of nanojets , 2000, Science.

[7]  P. C. Bettler,et al.  Activation Energy for the Surface Migration of Tungsten in the Presence of a High-Electric Field , 1960 .

[8]  S. Tkachenko,et al.  Investigation of the Heating Dynamics and Properties of Liquid Tungsten , 1998 .

[9]  Masanori Kunieda,et al.  Advancing EDM through fundamental insight into the process , 2005 .

[10]  H. Andren,et al.  On the charge state of tungsten ions in the pulsed-field atom probe , 1984 .

[11]  Kamlakar P Rajurkar,et al.  Investigation of Nanoscale Electro Machining (nano-EM) in Dielectric Oil , 2005 .

[12]  Hae Woon Choi,et al.  Electrical discharges between platinum nanoprobe tips and gold films at nanometre gap lengths , 2006 .

[13]  F. Okuyama,et al.  Properties of multiple field ion emitters of tungsten and a simple method for improving their ionization efficiency , 1978 .

[14]  David J. Smith,et al.  Kinetic control of Ge(Si)∕Si(100) dome cluster composition , 2005 .

[15]  Ju Gao,et al.  A simple method for growing high quantity tungsten-oxide nanoribbons under moist conditions , 2005 .

[16]  David Smith,et al.  The electric field and the stress on a field-ion specimen , 1970 .

[17]  Marc Gershow,et al.  DNA molecules and configurations in a solid-state nanopore microscope , 2003, Nature materials.

[18]  Kamlakar P Rajurkar,et al.  Micro and Nano Machining by Electro-Physical and Chemical Processes , 2006 .