Repair of step and flash imprint lithography templates
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William J. Dauksher | Kevin J. Nordquist | K. Gehoski | Roy White | Ron Bozak | David P. Mancini | Ngoc V. Le | Jeffrey E. Csuy | D. J. Resnick | L. Casoose | David W. Lee
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[2] William J. Dauksher,et al. Fabrication of step and flash imprint lithography templates using a variable shaped-beam exposure tool , 2004 .
[3] David P. Mancini,et al. Step and flash imprint lithography template characterization, from an etch perspective , 2003 .