Properties and applications of Sn-doped single crystal thin film magneto-resistance elements

Using Sn-doped single crystal InSb thin films of 1.0-/spl mu/m thickness grown on GaAs substrates by molecular beam epitaxy, new magneto-resistance elements with very small temperature dependence were developed. Using these magneto-resistance elements, the contactless detection of the rotation speed of rotating gear teeth over a wide range of rotation speeds was studied. The output voltage from the magneto-resistance element was independent of the rotation speed of the gear, and exhibited good temperature stability and very small sine wave sine wave distortion, which allowed fine detection of the angular velocity of the rotations.