Control of Crystal Orientation and Piezoelectric Response of Lead Zirconate Titanate Thin Films Near the Morphotropic Phase Boundary

PbZr0.53Ti0.47O3 (PZT) thin films with various preferred crystallographic orientations were synthesized on various substrates using pulsed laser deposition techniques. Larger piezoelectric displacement, which involved the bending vibration of the PZT film/substrate, was observed in randomly oriented PZT thin film than that in (100)- and (111)-preferred texture films. This result was discussed by correlation with the number of effective spontaneous polarization axes in the morphotropic phase boundary of the PZT system. Moreover, polarization fatigue was found to lower the electric-field-induced displacement significantly, indicating a large contribution of ferroelectric domain motion to the piezoelectric response of PZT thin films under bipolar drive.

[1]  Dragan Damjanovic,et al.  Piezoelectric properties of rhombohedral Pb(Zr, Ti)O3 thin films with (100), (111), and “random” crystallographic orientation , 2000 .

[2]  L. E. Cross,et al.  Fabrication and Electrical Properties of Lead Zirconate Titanate Thick Films , 1996 .

[3]  S. J. Milne,et al.  Processing and characterization of Pb(Zr, Ti)O_3 films, up to 10 μm thick, produced from a diol sol-gel route , 1996 .

[4]  Nava Setter,et al.  Interferometric measurements of electric field-induced displacements in piezoelectric thin films , 1996 .

[5]  S. Trolier-McKinstry,et al.  Thin-Film Integrated Ferroelectrics , 2003 .

[6]  R. Polcawich,et al.  Piezoelectric and dielectric reliability of lead zirconate titanate thin films , 2000 .

[7]  Kazunari Maki,et al.  Evaluation of Pb(Zr, Ti)O3 Films Derived from Propylene-Glycol-Based Sol-Gel Solutions , 2000 .

[8]  S. Mishra,et al.  Effect of phase coexistence at morphotropic phase boundary on the properties of Pb(ZrxTi1−x)O3 ceramics , 1996 .

[9]  B. Jaffe.  CHAPTER 7 – SOLID SOLUTIONS OF Pb(Ti, Zr, Sn, Hf)O3 , 1971 .

[10]  James F. Scott,et al.  A model for fatigue in ferroelectric perovskite thin films , 2000 .

[11]  X. Dong,et al.  Temperature dependence of dielectric, elastic and piezoelectric properties of Pb(ZrxTi1-x)O3 ceramics near the morphotropic phase boundary , 1997 .

[12]  E. Sawaguchi.  Ferroelectricity versus Antiferroelectricity in the Solid Solutions of PbZrO3 and PbTiO3 , 1953 .

[13]  Y. Masuda,et al.  Optimization of Composition and Crystal Structure for Processing Route of PZT System , 2001 .

[14]  Nancy R. Sottos,et al.  Effects of thickness on the piezoelectric and dielectric properties of lead zirconate titanate thin films , 2000 .

[15]  M. Kakihana,et al.  Neutron Diffraction Studies of Pb(ZrxTi1-x)O3 Ceramics , 2000 .