High-Production-Rate Fabrication of Low-Loss Lithium Niobate Electro-Optic Modulators Using Photolithography Assisted Chemo-Mechanical Etching (PLACE)
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Z. Fang | H. Qi | Min Wang | Junxia Zhou | Youting Liang | Yan-hong Cheng | Rongbo Wu | Difeng Yin | Lan Gao | Yong Zheng | Ya Cheng