Quantification of Sheet Resistance in Boron-Diffused Silicon Using Micro-Photoluminescence Spectroscopy at Room Temperature
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S. Harvey | D. Macdonald | Hieu T. Nguyen | S. Johnston | Chang Sun | S. Phang | C. Samundsett | T. Trupke | M. Al‐Jassim | D. Yan | A. Paduthol | S. Johnston