A theory model which describes the localized wavefront deformation of the optics elements is set up.The propagation regularity of the high-power plane-wave in the optics elements with localized wavefront deformation is investigated by linearization method of the ripple propagation.A continuous laser medium as an example is simulated with the model,and the spectral distribution clue to the localized wavefront deformation with different scales,the nonlinear gain of the amplitude clue to wave-front ripple with differen frequency,the relationship between the nonlinear gain and the beam transmission distance in the case of different B integral,the transmission distance where there exists the largest nonlinear gain of the output beam amplitude,and the amplitude distribution by the localized wavefront deformation are obtained.The simulation results show that to avoid damaging the optics it is nccessary to prevent the flaws from coming into being of 0.5~2.0 mm in radius on the surface of the optics.