Atomic force microscopy (AFM) is a newly developed high resolution microscopy technique which is capable of mapping forces near surfaces or, by means of these forces, the topography of the surface itself. In one mode of operation, AFM can resolve individual atoms on both conducting and insulating surfaces. A crucial component for the AFM is a flexible force‐sensing cantilever stylus, whose properties should include, among other things: a sharp tip, a low force constant, and a high mechanical resonance frequency. These requirements can be met by reducing the size of the cantilever stylus through microfabrication techniques and employing novel methods to construct a sharp tip. Presented here are a number of microfabrication processes for constructing cantilever styli with properties ideal for the AFM. These fabrication processes include (1) a method for producing thin film SiO2 or Si3N4 cantilevers without tips, (2) a method for producing Si3N4 cantilevers with integrated pyramidal tips formed by using an e...