A new metalorganic chemical vapor deposition process for MoS2 with a 1,4-diazabutadienyl stabilized molybdenum precursor and elemental sulfur.
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K. Schierbaum | A. Ostendorf | A. Kostka | A. Devi | M. Kasischke | D. Rogalla | E. Ciftyurek | Nils Boysen | D. Zanders | Jan‐Lucas Wree