Current Transport Mechanism of Hydrogenated Amorphous Silicon Schottky Barrier Diodes

We report detailed studies on the forward current-voltage characteristics of Pd/a-Si:H Schottky barrier diodes. Exact values of the barrier height and its temperature coefficient have been determined by the internal photoemission technique. Based upon this result, the current transport mechanism through the a-Si:H Schottky barrier has been quantitatively examined. The fundamental characteristics of the Schottky barrier are considered to be dominated by diffusion theory rather than by thermionic emission theory.