Nonlinear analysis of micro piezoelectric energy harvesters

This article proposes a framework for determining the types of nonlinearity observed in the frequency response of microscale energy harvesters made of a piezoelectric film deposited on a stainless-steel substrate. The model accounts for inertial, geometrical and material nonlinearities due to amplified excitation and induced hysteresis. The simulations based on the multiple scale analysis reveals the softening type of nonlinearity for the case of a 15 μm PZT thick film deposited on a 60 μm stainless-steel substrate. They agree quite well with the experimental observations. In addition, the further investigation shows the existence of the critical film thickness such that the hardening (softening) nonlinearity is observed if the film thickness is below (above) this critical value. It is also found that such a key parameter is mainly affected by the ratio of the bending stiffness due to material nonlinearity to that based on linear moduli. Finally, the hardening type of nonlinearity was also observed in different samples with very small film thickness, as predicted by the proposed framework.

[1]  Grzegorz Litak,et al.  Non-linear piezoelectric vibration energy harvesting from a vertical cantilever beam with tip mass , 2012 .

[2]  V. Pop,et al.  Vacuum-packaged piezoelectric vibration energy harvesters: damping contributions and autonomy for a wireless sensor system , 2010 .

[3]  H. Wikle,et al.  The design, fabrication and evaluation of a MEMS PZT cantilever with an integrated Si proof mass for vibration energy harvesting , 2008 .

[4]  D. J. Inman,et al.  Parametric Study of Zigzag Microstructure for Vibrational Energy Harvesting , 2012, Journal of Microelectromechanical Systems.

[5]  Andrés Vásquez Quintero,et al.  Design optimization of vibration energy harvesters fabricated by lamination of thinned bulk-PZT on polymeric substrates , 2014 .

[6]  Wen-Jong Wu,et al.  Fabrication of PZT MEMS energy harvester based on silicon and stainless-steel substrates utilizing an aerosol deposition method , 2013 .

[7]  Zhong Lin Wang,et al.  Microfibre–nanowire hybrid structure for energy scavenging , 2009, Nature.

[8]  Chengkuo Lee,et al.  Piezoelectric MEMS Energy Harvester for Low-Frequency Vibrations With Wideband Operation Range and Steadily Increased Output Power , 2011, Journal of Microelectromechanical Systems.

[9]  M. F. Lumentut,et al.  Electromechanical finite element modelling for dynamic analysis of a cantilevered piezoelectric energy harvester with tip mass offset under base excitations , 2014 .

[10]  Victor Farm-Guoo Tseng,et al.  A capacitive vibration-to-electricity energy converter with integrated mechanical switches , 2008 .

[11]  Ehab F. El-Saadany,et al.  A wideband vibration-based energy harvester , 2008 .

[12]  Shiqiao Gao,et al.  Design, fabrication and performances of MEMS piezoelectric energy harvester , 2015 .

[13]  Senlin Jiang,et al.  On the optimization of piezoelectric vibration energy harvester , 2015 .

[14]  Saibal Roy,et al.  A micro electromagnetic generator for vibration energy harvesting , 2007 .

[15]  Daniel J. Inman,et al.  Piezoelectric Energy Harvesting , 2011 .

[16]  I. C. Lien,et al.  Array of piezoelectric energy harvesting by the equivalent impedance approach , 2012 .

[17]  Y. Shu,et al.  Analysis of power output for piezoelectric energy harvesting systems , 2006 .

[18]  Yaowen Yang,et al.  Nonlinear piezomagnetoelastic harvester array for broadband energy harvesting , 2016 .

[19]  Albert P. Pisano,et al.  Corrugated aluminum nitride energy harvesters for high energy conversion effectiveness , 2011 .

[20]  Eric M. Yeatman,et al.  Wideband excitation of an electrostatic vibration energy harvester with power-extracting end-stops , 2013 .

[21]  Walied A. Moussa,et al.  Low frequency piezoelectric energy harvesting at multi vibration mode shapes , 2015 .

[22]  Alper Erturk,et al.  Unified nonlinear electroelastic dynamics of a bimorph piezoelectric cantilever for energy harvesting, sensing, and actuation , 2014, Nonlinear Dynamics.

[23]  Chieh-Min Wang,et al.  A Miniature Mechanical-Piezoelectric-Configured Three-Axis Vibrational Energy Harvester , 2015, IEEE Sensors Journal.

[24]  David Koo,et al.  Modeling the performance of a micromachined piezoelectric energy harvester , 2012 .

[25]  S. Lin,et al.  Piezoelectric micro energy harvesters based on stainless-steel substrates , 2013 .

[26]  Walied A. Moussa,et al.  Wide-bandwidth piezoelectric energy harvester with polymeric structure , 2014 .

[27]  Daniel Guyomar,et al.  Piezoelectric Ceramics Nonlinear Behavior. Application to Langevin Transducer , 1997 .

[28]  H C Lin,et al.  Analysis of an array of piezoelectric energy harvesters connected in series , 2013 .

[29]  Yi-Chung Shu,et al.  Finite element modeling of electrically rectified piezoelectric energy harvesters , 2015 .

[30]  Gwiy-Sang Chung,et al.  Fabrication and characterization of vibration-driven AlN piezoelectric micropower generator compatible with complementary metal-oxide semiconductor process , 2015 .

[31]  Danick Briand,et al.  Vibrational piezoelectric energy harvesters based on thinned bulk PZT sheets fabricated at the wafer level , 2014 .

[32]  Fatimah Ibrahim,et al.  Design and Development of Micro-Power Generating Device for Biomedical Applications of Lab-on-a-Disc , 2015, PloS one.

[33]  Wen-Jong Wu,et al.  Revisit of series-SSHI with comparisons to other interfacing circuits in piezoelectric energy harvesting , 2010 .

[34]  Sang-Gook Kim,et al.  MEMS power generator with transverse mode thin film PZT , 2005 .

[35]  Yi-Chung Shu,et al.  Efficiency of energy conversion for a piezoelectric power harvesting system , 2006 .

[36]  Fang Hua-bin,et al.  A MEMS-Based Piezoelectric Power Generator for Low Frequency Vibration Energy Harvesting , 2006 .

[37]  N. Jalili,et al.  Modeling, Nonlinear Dynamics, and Identification of a Piezoelectrically Actuated Microcantilever Sensor , 2008, IEEE/ASME Transactions on Mechatronics.

[38]  Khalil Najafi,et al.  A Micro Inertial Energy Harvesting Platform With Self-Supplied Power Management Circuit for Autonomous Wireless Sensor Nodes , 2014, IEEE Journal of Solid-State Circuits.

[39]  Jan M. Rabaey,et al.  Energy Scavenging for Wireless Sensor Networks: with Special Focus on Vibrations , 2012 .

[40]  Wen-Jong Wu,et al.  An improved analysis of the SSHI interface in piezoelectric energy harvesting , 2007 .