Robust Data-Driven Control for the Stage Synchronization Problem

Abstract This paper discusses a method for introducing frequency-domain robustness constraints in a data-driven control design. The method is based on adaptive weighting filters used in a time-domain cost function to be minimized. In an iterative way, violation of the frequency-domain robustness constraints is checked by model prediction and accounted for by adapting the weighting filters. The method is applied to the stage synchronization problem in wafer scanners, which involves synchronization of the outputs of two motion systems, and will be discussed in view of both simulation results and experimental results.

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