论文信息 - Etching Kinetics of (100) Single Crystal Diamond Surfaces in a Hydrogen Microwave Plasma, Studied with In Situ Low‐Coherence Interferometry - 字舞流文

Etching Kinetics of (100) Single Crystal Diamond Surfaces in a Hydrogen Microwave Plasma, Studied with In Situ Low‐Coherence Interferometry

V. Ralchenko | V. Voronov | E. Zavedeev | A. Khomich | A. Bolshakov | V. Yurov | E. Bushuev | I. Antonova | E. Ashkinazi