Making, testing, applying: some progress in the field of micro-optics at ITO

Microoptical components play an increasing role in different technology fields such as medical engineering, materials and information processing, imaging and metrology. But their realization needs the combination of modern design concepts with sophisticated processing technologies, new materials and design tools. Furthermore, the introduction of ambitious processing technologies must be accompanied by effective metrology and inspection tools. Therefore, this paper reports about the technologies for making microoptics at ITO. Because sophisticated measurement tools are an indispensable part of the fabrication process, the paper describes our multi-scale inspection approach for the testing of microstructures on wafer-scale level. Finally, some representative applications of microoptical components for advanced measurement and imaging are explained.

[1]  Zhenwu Lu,et al.  Lithographic fabrication of large diffractive optical elements on a concave lens surface. , 2002, Optics express.

[2]  Paul Murphy,et al.  Subaperture stitching interferometry for testing mild aspheres , 2006, SPIE Optics + Photonics.

[3]  Wolfgang Osten,et al.  Scaled topometry in a multisensor approach , 2004 .

[4]  Wolfgang Osten,et al.  Fourier descriptors for defect indication in a multiscale and multisensor measurement system , 2011 .

[5]  Daniela Radtke,et al.  Laser-lithography on non-planar surfaces. , 2007, Optics express.

[6]  Michael Kuechel.  Absolute Measurement of Rotationally Symmetric Aspheric Surfaces , 2006 .

[7]  Thomas Graf,et al.  High-power radially polarized Yb:YAG thin-disk laser with high efficiency. , 2011, Optics express.

[8]  Hans J. Tiziani,et al.  Computer-generated holograms in interferometric testing , 2004 .

[9]  Wolfgang Osten,et al.  Assistant systems for efficient multiscale measurement and inspection , 2011, Optical Metrology.

[10]  Marwan Abdou Ahmed,et al.  Single-layer resonant-waveguide grating for polarization and wavelength selection in Yb:YAG thin-disk lasers. , 2012, Optics express.

[11]  Wolfgang Osten,et al.  Different Ways to Overcome the Resolution Problem in Optical Micro and Nano Metrology , 2012 .

[12]  W. Osten,et al.  Fiber optic spark plug sensor for UV-LIF measurements close to the ignition spark , 2005, SPIE Optical Metrology.

[13]  Wolfgang Osten,et al.  Implementation and analysis of an automated multiscale measurement strategy for wafer scale inspection of micro electromechanical systems , 2012 .

[14]  Uwe Zeitner,et al.  Next-generation test equipment for micro-production , 2010, Photonics Europe.

[15]  W. Osten,et al.  Interferometer for precise and flexible asphere testing. , 2008, Optics letters.

[16]  Thomas Graf,et al.  Circular grating waveguide structures for intracavity generation of azimuthal polarization in a thin-disk laser. , 2012, Optics letters.

[17]  Wolfgang Osten,et al.  Diffractive/refractive (hybrid) UV-imaging system for minimally invasive metrology: design, performance, and application experiments. , 2012, Applied optics.

[18]  A G Verhoglyad,et al.  Polar coordinate laser pattern generator for fabrication of diffractive optical elements with arbitrary structure. , 1999, Applied optics.

[19]  Jürgen Jahns,et al.  Introduction to Micro- and Nanooptics , 2012 .

[20]  Christof Pruss,et al.  Laser direct writing of rotationally symmetric high-resolution structures. , 2011, Applied optics.