Design and simulation of an optimized electrothermal microactuator with Z-shaped beams
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[1] Yong Zhu,et al. Bidirectional Electrothermal Actuator With Z-Shaped Beams , 2012, IEEE Sensors Journal.
[2] Linear Thermomechanical Microactuators , 1999, Micro-Electro-Mechanical Systems (MEMS).
[3] H. Espinosa,et al. Institute of Physics Publishing Journal of Micromechanics and Microengineering a Thermal Actuator for Nanoscale in Situ Microscopy Testing: Design and Characterization , 2022 .
[4] Brandon K. Chen,et al. Mechanical characterization of thin films using a MEMS device inside SEM , 2015, 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS).
[5] Yong Zhu,et al. An electrothermal microactuator with Z-shaped beams , 2010 .
[6] Placid Mathew Ferreira,et al. Simultaneous actuation and displacement sensing for electrostatic drives , 2008 .
[7] Horacio D Espinosa,et al. An electromechanical material testing system for in situ electron microscopy and applications. , 2005, Proceedings of the National Academy of Sciences of the United States of America.
[8] Micky Rakotondrabe,et al. Control of a Novel 2-DoF MEMS Nanopositioner With Electrothermal Actuation and Sensing , 2014, IEEE Transactions on Control Systems Technology.
[9] Yongjun Lai,et al. Displacement sensing of a micro-electro-thermal actuator using a monolithically integrated thermal sensor , 2009 .
[10] Margarita Tecpoyotl-Torres,et al. Design of MEMS vertical–horizontal chevron thermal actuators , 2009 .