The influence of humidity of supplied gases on on electrochemically active surface area and charge transfer resistance in cathode process of PEM fuel cell was studied. Impedance spectra for cells operated with various gas stream combinations - H2/Air, H2/O2, H2/H2 and H2/N2 - was analyzed to determine the physical/chemical origin of the spectra features. Cathode charge transfer resistance increased with a decrease in the humidity of supplied gases. As well, a reduction in the electrochemically active surface area with a decrease in relative humidity was observed.