Technology of Multilayers Structure in Thin Film Microwave and Millimeter Wave Integrated Circuits

In recent years,as the need to use higher frequencies in communications and surveillance grows,test and measurement equipment such as spectrum analyzers,sweep generators,and network analyzers,have evolved to meet the needs of the microwave industry.As a key component in these microwave equipment,the thin film hybride integrated circuits as it is commonly known,was a major stumbling block in the push to frequencies above 40 GHz.The thin film hybride integrated circuits are widely used in microwave and millimeter wave projects.These circuits have multilayers structures.The study of character of the film and the fabrication technologies.The experimental results are given and discussed.It is of important referenced values for design and application of microwave and millimeter wave components.