2.5 kHz high-repetition-rate XeCl excimer laser

these industrial applications.For the purpose of reaching higher repetition rates, we have constructedan experimental apparatus capable of circulating laser gas uniformly at upto 100 m/s and have clarified the optimum conditions for its operation. Theaverage laser and the gas flow rate vs. the repetition rate are presentedfor both He and Ne buffer gas mixtures.2. ExperimentFigure 1 shows the conceptual cross-section of the experimental apparatuswhich is 2.0 m in length, 1.5 m in height, and 1.0 m in width. It is Teflon