The soft Ni-Zn ferrites thin films were fabricated by a new metal salts-routed sol-gel proccssing, and magnetic properties of the films were investigated. A film with an homogeneous spinel phase was obtained from stock solution spun on SiO 2 /Si(100) substrate and a subsequent heat treatment ranging 500-800°C in air or O 2 The microstructure of the films consisted of spherical grains of 500-1000 A in size and 50-100 A in surface roughness (rms). Microstructure and magnetic properties of the films were functions of annealing temperature and atmosphere. The optimized film was attained by annealing at 600°C in O 2 , which exhibited M s =300 emu/cc and H c = 170 Oe.
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