Design and driving characteristics of ultrasonic linear motor

Abstract This paper gives results on theoretical and experimental studies about an ultrasonic linear motor using a combination of the first longitudinal and the fourth bending mode. Four pairs of stacked PZT ceramic plates were bonded both on and bottom sides of a straight aluminum bar as driving elements. The length of the aluminum bar was calculated by the classical beam theory. The size and attaching positions of the ceramic plates and the projections were determined by a finite element method. The velocity and the static thrust of the motor were measured by changing the voltage of input source.