A New Test Method and System of Low-cost MEMS Gyroscope

The test precision of MEMS gyroscope parameters is depressed by the influence of its big input axis misalignment angle. We studied the influence to the test error of input axis misalignment angle itself and the scale factor. Then we proposed an uncouple principle, established a precise mathematic model, and designed a set of uncouple test equipment and experiment. The findings of half-physics simulation show that this method can realize uncoupling of scale factor and input axis misalignment and can make the test precision be free from the influence of the input axis misalignment value. This method can improve the test accurate and especially be suitable to the MEMS gyroscopes with big input axis misalignment angles.