Chapter 2. Computer-Integrated Design and Manufacture of Integrated Circuits

Contains an introduction, principal objectives and accomplishments for this chapter's research, reports on two research projects and a list of publications.

[1]  D. E. Troxel.  Digital Design Tools , 1992, Proceedings. Twenty-Second Annual conference Frontiers in Education.

[2]  Michael L. Heytens,et al.  Gestalt-class : A Persistent , Multi-user CLOS Application Environment , 1996 .

[3]  Duane S. Boning,et al.  Analysis and decomposition of spatial variation in integrated circuit processes and devices , 1997 .

[4]  Duane S. Boning,et al.  A general semiconductor press modeling framework , 1992 .

[5]  James T. Kao.  Remote microscope for inspection of integrated circuits , 1995 .

[6]  Jarvis Benjamin Jacobs.  Modeling of electron transport in sub-100 nm channel length silicon MOSFETs , 1995 .

[7]  Jimmy Y. Kwon.  Remote fabrication of integrated circuits : software support for the M.I.T. computer aided fabrication environment , 1995 .

[8]  Nicole S. Love,et al.  Statistical Process Control Charts for the Computer-Aided Fabrication Environment , 1994 .

[9]  Owen B. Wessling.  RTFM--a digital design lab expert , 1996 .

[10]  Somsak Kittipiyakul.  Automated remote microscope for inspection of integrated circuits , 1996 .

[11]  Duane S. Boning,et al.  CAFE-the MIT computer aided fabrication environment , 1990, Ninth IEEE/CHMT International Symposium on Electronic Manufacturing Technology,Competitive Manufacturing for the Next Decade.

[12]  J. J. Clement,et al.  Simulation of the effects of grain structure and grain growth on electromigration and the reliability of interconnects , 1997 .

[13]  William P. Moyne.  Run by run control : interfaces, implementation, and integration , 1995 .

[14]  Duane S. Boning,et al.  CAFE-the MIT computer aided fabrication environment , 1990 .

[15]  John C Carney.  Message passing tools for software integration , 1995 .

[16]  Duane S. Boning,et al.  A General Semiconductor Process Modeling Framework , 1992 .

[17]  Donald E. Troxel,et al.  Architecture for distributed design and fabrication , 1997, Other Conferences.

[18]  Michael L. Heytens,et al.  The design and implementation of a parallel persistent object system , 1992 .

[19]  Miltiadis Aris Stamatopoulos.  A factory representation as a design tool in a computer integrated manufacturing environment , 1994 .

[20]  Barbara L. Goldstein.  Plug and Play Software for Agile Manufacturing , 1997 .

[21]  V. T. Rajan,et al.  Semiconductor wafer representation for TCAD , 1994, IEEE Trans. Comput. Aided Des. Integr. Circuits Syst..

[22]  Donald E. Troxel,et al.  Internet remote microscope , 1996, Other Conferences.

[23]  Duane S. Boning,et al.  Flexible distributed architecture for semiconductor process control and experimentation , 1997, Other Conferences.

[24]  Asbjoern M. Bonvik.  Estimating the Lead Time Distribution of Priority Lots in a Semiconductor Factory , 1994 .

[25]  Evren R. Unver.  Implementation of a design rule checker for silicon wafer fabrication , 1994 .