论文信息 - Evidence of atomic-scale arsenic clustering in highly doped silicon - 字舞流文

Evidence of atomic-scale arsenic clustering in highly doped silicon

R. Pantel | S. Duguay | T. Philippe | B. Deconihout | F. Vurpillot | G. Servanton | R. Lardé | E. Cadel | R. Lardé