High Temperature Microsensors Based On Polycrystalline Diamond Thin Films

SUMMARY The outstanding properties of diamond and the reproducible deposition of polycrystalline diamond on large area substrates has made it an interesting base material for microsensors. Of special importance are sensor applications at high temperatures and in harsh environments. Microsensors based on polycrystalline diamond films include thermistors, pressure sensors, flow sensors, and chemical sensors. But today’s diamond film microsenSOTS’ long term operation is limited by two mechanisms: (i) oxidation of the diamond film above 500°C and (ii) degradation of the contacts. Therefore it is necessary that reliable contacts, passivation, and packaging for high temperature applications and harsh environments are developed.