Plasma Etching of Poly(dimethylsiloxane): Roughness Formation, Mechanism, Control, and Application in the Fabrication of Microfluidic Structures
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Angeliki Tserepi | Evangelos Gogolides | George Kokkoris | Christophe Cardinaud | C. Cardinaud | E. Gogolides | G. Kokkoris | A. Tserepi | M. Vlachopoulou | M. E. Vlachopoulou
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