MEMS mirror array for a wavelength-selective 1xK switch

We present a new MEMS mirror device that fulfills the requirements needed for its use in a wavelength selective switch. The MEMS device consists of a 1D array of individually controllable tilt micromirrors with almost 100% filling factor. Each mirror in the array is used to manipulate an individual wavelength channel, attenuating or redirecting it into a different output. The mirrors are electrostatically rotated around a fixed pivot and they use a novel concept of angle amplification to increase their out-of-plane angular rotation. A detailed analysis of their mechanical and optical response is presented.

[1]  H. Kahn,et al.  A new technique for producing large-area as-deposited zero-stress LPCVD polysilicon films: the MultiPoly process , 2000, Journal of Microelectromechanical Systems.

[2]  J. Bagdahn,et al.  Reliability of polycrystalline silicon under long-term cyclic loading , 2002, Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266).

[3]  James A. Walker,et al.  The future of MEMS in telecommunications networks , 2000 .

[4]  R. Ritchie,et al.  High-cycle fatigue of single-crystal silicon thin films , 2001 .

[5]  G. Kovacs.  Micromachined Transducers Sourcebook , 1998 .

[6]  F. Klemens,et al.  Monolithic MEMS optical switch with amplified out-of-plane angular motion , 2002, IEEE/LEOS International Conference on Optical MEMs.