ANALYSIS OF SAW EXCITATION AND PROPAGATION UNDER PERIODIC METALLIC GRATING STRUCTURES

This paper reviews numerical techniques used for the analysis of excitation and propagation properties of surface acoustic waves (SAWs) under periodic metallic grating structures. First, the finite element method (FEM), the boundary element method (BEM) and the spectral domain analysis (SDA) are compared for the SAW field analysis. Then it is shown how skillfully excitation and propagation properties are characterized by using the FEM/SDA technique. Extended FEM/SDA theories are also detailed for the analysis of multi-finger grating structures.