论文信息 - Full-0.56 /spl mu/m pitch copper interconnects for a high performance 0.15-/spl mu/m CMOS logic device - 字舞流文

Full-0.56 /spl mu/m pitch copper interconnects for a high performance 0.15-/spl mu/m CMOS logic device

S. Yokogawa | K. Sugai | A. Nishizawa | K. Motoyama | M. Iguchi | T. Takewaki | Y. Matsubara | Y. Kunimune | N. Ito | Y. Tsuchiya | T. Matsui | K. Fujii | A. Kubo | H. Suzuki | H. Tachibana | K. Nakabeppu | S. Yamasaki | Y. Yamamoto | T. Kunugi | S. Nakata | M. Kagamihara | A. Shida | S. Nakamoto | H. Gomi