ArF*, KrF*, and FI lasers pumped by double discharge from generator with semiconductor opening switch

Discharge and laser parameters in high-pressure gas mixtures of rare gases with F2 under pumping by generators with inductive energy storage (IES) and semiconductor opening switch (SOS) are studied. It was shown that the pre-pulse with high pumping power formed by IES produces high-density discharge plasma and inversion population in gas mixtures under study within ∼10 ns and provides both early one-set of lasing and conditions for efficient excitation of an active medium from the storage capacitor. The high-voltage pre-pulse from the IES and sharp increase of discharge current allows to form long-lived stable volume discharge. Improve of pulse duration and (or) output energy was achieved for atomic fluorine, ArF* and KrF* excimer lasers.

[1]  D. Morton.  Atomic data for resonance absorption lines. I, Wavelengths longward of the Lyman limit , 1991 .

[2]  M. Kushner,et al.  High efficiency XeCl laser with spiker and magnetic isolation , 1986 .

[3]  M. A. Kovacs,et al.  VISIBLE LASER ACTION IN FLUORINE I , 1970 .

[4]  H. Mizoguchi,et al.  Rapid discharge-pumped wide aperture X-ray preionized KrF laser , 1991 .

[5]  Klaus J. Boller,et al.  Current filamentation in discharge-excited F2-based excimer laser gas mixtures , 2006 .

[6]  P Parvin,et al.  Spectral Lines of the Atomic-Fluorine Laser from 2 psi (absolute) to 5.5 atm. , 2001, Applied optics.

[7]  A. Razhev,et al.  LASERS, ACTIVE MEDIA: Excimer KrF laser with He buffer gas, 0.8 J energy, and 2% efficiency , 1998 .

[8]  Rod S. Taylor,et al.  Ultralong optical‐pulse corona preionized XeCl laser , 1989 .

[9]  A. N. Panchenko,et al.  Laser on nitrogen-electronegative gas mixtures, pumped by inductive energy storage generator: Experiment and theoretical model , 2009 .

[10]  Alexei N. Panchenko,et al.  Discharge lasers pumped by double-discharge generators based on inductive energy storage , 2010, International Conference on Coherent and Nonlinear Optics.

[11]  Alexei N. Panchenko,et al.  Efficient discharge lasers pumped by double-discharge circuits with semiconductor opening switch , 2010, International Symposium on High Power Laser Systems and Applications.

[12]  A. N. Panchenko,et al.  Efficient gas lasers pumped by double-discharge circuits with semiconductor opening switch , 2012 .

[13]  R. Taylor,et al.  Magnetic-spiker excitation of gas-discharge lasers , 1994 .

[14]  Irving J. Bigio,et al.  High‐power visible laser action in neutral atomic fluorine , 1976 .

[15]  Vladimir M. Borisov,et al.  Pumping rate of electric-discharge excimer lasers , 1995 .

[16]  William H. Long,et al.  Efficient discharge pumping of an XeCl laser using a high‐voltage prepulse , 1983 .

[17]  Mark J. Kushner,et al.  Microarcs as a Termination Mechanism of Optical Pulses in Electric-Discharge-Excited , 1991 .

[18]  Alexander M. Razhev,et al.  High-efficient discharge-pumped ArF (193 nm) excimer laser with a TPI thyratron as a high-voltage switch , 2007, International Conference on Lasers, Applications, and Technologies.