Decreased trap density and lower current collapse in AlGaN/GaN HEMTs by adding a magnetron-sputtered AlN gate
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Xiao-hua Ma | J. Ao | Tingting Wang | Taofei Pu | Fengqiu Jiang | Ling Yang | Yue Hao | Xiao Wang | Yue He | Mao Jia | Yang Li | Hengyi Zhang | Yuyu Bu | Chen-Yang Liu | Ke Fang