Demonstration of a low V pi L modulator with GHz bandwidth based on electro-optic polymer-clad silicon slot waveguides.

We demonstrate a near-infrared electro-optic modulator with a bandwidth of 3 GHz and a V(pi)L figure of merit of 0.8 V-cm using a push-pull configuration. This is the highest operating speed achieved in a silicon-polymer hybrid system to date by several orders of magnitude. The modulator was fabricated from a silicon strip-loaded slot waveguide and clad in a nonlinear polymer. In this geometry, the electrodes form parts of the waveguide, and the modulator driving voltage drops across a 200 nm slot.

[1]  Larry R. Dalton,et al.  Nonlinear polymer-clad silicon slot waveguide modulator with a half wave voltage of 0.25 V , 2008 .

[2]  Harald F. Okorn-Schmidt,et al.  Characterization of silicon surface preparation processes for advanced gate dielectrics , 1999, IBM J. Res. Dev..

[3]  F. Diederich,et al.  All-optical high-speed signal processing with silicon–organic hybrid slot waveguides , 2009 .

[4]  Kun-Yii Tu,et al.  CMOS-Compatible Si-Ring-Assisted Mach–Zehnder Interferometer With Internal Bandwidth Equalization , 2010, IEEE Journal of Selected Topics in Quantum Electronics.

[5]  Juthika Basak,et al.  40 Gbit/s silicon optical modulator for highspeed applications , 2007 .

[6]  Michael Hochberg,et al.  Design of transmission line driven slot waveguide Mach-Zehnder interferometers and application to analog optical links. , 2010, Optics express.

[7]  Jingdong Luo,et al.  Rational molecular design and supramolecular assembly of highly efficient organic electro-optic materials , 2009 .

[8]  Wolfgang Freude,et al.  Silicon Organic Hybrid Technology—A Platform for Practical Nonlinear Optics , 2009, Proceedings of the IEEE.

[9]  Wolfgang Freude,et al.  Highly-Nonlinear Silicon Photonics Slot Waveguide , 2008 .

[10]  E P Ippen,et al.  CMOS-compatible dual-output silicon modulator for analog signal processing. , 2008, Optics express.

[11]  Thomas F. Krauss,et al.  Electro-optic modulation in slotted resonant photonic crystal heterostructures , 2009 .

[12]  T. Baehr‐Jones,et al.  Polymer Silicon Hybrid Systems: A Platform for Practical Nonlinear Optics† , 2008 .

[13]  H. Fetterman,et al.  Demonstration of 110 GHz electro-optic polymer modulators , 1997 .

[14]  R Lawson,et al.  Optical modulation and detection in slotted Silicon waveguides. , 2005, Optics express.

[15]  Joerg Heber,et al.  Broadband Modulation of Light by Using an Electro-Optic Polymer , 2002, Science.

[16]  Design and fabrication of high-efficiency fibre couplers for nanophotonic devices , 2007 .

[17]  Qianfan Xu,et al.  Guiding and confining light in void nanostructure. , 2004, Optics letters.

[18]  Larry Dalton,et al.  Towards a millivolt optical modulator with nano-slot waveguides. , 2007, Optics express.

[19]  L. Sekaric,et al.  Ultra-compact, low RF power, 10 Gb/s silicon Mach-Zehnder modulator. , 2007, Optics express.

[20]  M. Paniccia,et al.  A high-speed silicon optical modulator based on a metal–oxide–semiconductor capacitor , 2004, Nature.

[21]  Maryse Fournier,et al.  Low-loss strip-loaded slot waveguides in silicon-on-insulator. , 2010, Optics express.

[22]  R. Soref,et al.  Electrooptical effects in silicon , 1987 .