T-Shaped Piezoelectric Structure for High-Performance MEMS Vibration Energy Harvesting

In the recent decades energy harvesting from ambient vibration by the micro-electromechanical systems (MEMS) has been recognized as a promising solution to boosting lifespan of low-power electronic devices. Apparently, highly efficient MEMS vibration harvesters with lower operational frequencies are advantageous. In this paper we propose a new mechanical structure to aim for energy conversion efficiency enhancement and operational frequency reduction for the piezoelectric MEMS vibration energy harvesters. The proposed structure has a T-shaped geometry with integration of two identical proof masses at the T-segment. Thanks to two degrees-of-freedom, in this structure both bending and torsional mode frequencies can be located close to each other. Its analytic model of frequency response is derived and then validated by finite element modeling (FEM) simulations and prototype measurements. Compared to the conventional straight cantilever configuration, our proposed T-shaped piezoelectric cantilever structure can help distribute mechanical strain in broader areas with higher magnitude and lower resonant frequency. Our analytical, numerical, and experimental studies show that the normalized power density of the proposed T-shaped harvester is 4.8 times higher than that of the conventional one, in addition to 36% resonant frequency reduction. [2019-0146]

[1]  Lihong Zhang,et al.  Portable Wind Energy Harvesters for Low-Power Applications: A Survey , 2016, Sensors.

[2]  Lei Gu,et al.  Low-frequency piezoelectric energy harvesting prototype suitable for the MEMS implementation , 2011, Microelectron. J..

[3]  Yu Jia,et al.  Five topologies of cantilever-based MEMS piezoelectric vibration energy harvesters: a numerical and experimental comparison , 2016 .

[4]  Xiaohao Wang,et al.  Review of MEMS Electromagnetic Vibration Energy Harvester , 2017, Journal of Microelectromechanical Systems.

[5]  Ghislain Despesse,et al.  An Autonomous Piezoelectric Energy Harvesting IC Based on a Synchronous Multi-Shot Technique , 2014, IEEE Journal of Solid-State Circuits.

[6]  Wei-Hsin Liao,et al.  Magnetic-spring based energy harvesting from human motions: Design, modeling and experiments , 2017 .

[7]  Shao-Tuan Chen,et al.  A new electrode design method in piezoelectric vibration energy harvesters to maximize output power , 2017 .

[9]  Jingquan Liu,et al.  Design, Fabrication, and Characterization of Bimorph Micromachined Harvester With Asymmetrical PZT Films , 2019, Journal of Microelectromechanical Systems.

[10]  Sijun Du,et al.  An Inductorless Bias-Flip Rectifier for Piezoelectric Energy Harvesting , 2017, IEEE Journal of Solid-State Circuits.

[11]  Alireza Khaligh,et al.  Energy Harvesting: Solar, Wind, and Ocean Energy Conversion Systems , 2009 .

[12]  Jan M. Rabaey,et al.  Improving power output for vibration-based energy scavengers , 2005, IEEE Pervasive Computing.

[13]  Gehan A. J. Amaratunga,et al.  A Cold-Startup SSHI Rectifier for Piezoelectric Energy Harvesters With Increased Open-Circuit Voltage , 2019, IEEE Transactions on Power Electronics.

[14]  Yahia Bouzelata,et al.  Mitigation of high harmonicity and design of a battery charger for a new piezoelectric wind energy harvester , 2018 .

[15]  Frederic Nabki,et al.  Design of the Squared Daisy: A Multi-Mode Energy Harvester, with Reduced Variability and a Non-Linear Frequency Response , 2019, Sensors.

[16]  W. F. Stokey,et al.  CHAPTER 7 VIBRATION OF SYSTEMS HAVING DISTRIBUTED MASS AND ELASTICITY , 2001 .

[17]  Yu Jia,et al.  Power Optimization by Mass Tuning for MEMS Piezoelectric Cantilever Vibration Energy Harvesting , 2016, Journal of Microelectromechanical Systems.

[18]  Lihong Zhang,et al.  Curve-Shaped Anchor for Durability and Efficiency Improvement of Piezoelectric MEMS Energy Harvesters , 2018, 2018 IEEE SENSORS.

[19]  Xin Wen,et al.  Method to Further Improve Sensitivity for High-Order Vibration Mode Mass Sensors With Stepped Cantilevers , 2017, IEEE Sensors Journal.

[20]  Seyedfakhreddin Nabavi,et al.  Design and optimization of MEMS piezoelectric energy harvesters for improved efficiency , 2017, 2017 IEEE SENSORS.

[21]  Soon-Duck Kwon,et al.  A T-shaped piezoelectric cantilever for fluid energy harvesting , 2010 .

[22]  Siyuan He,et al.  Improving Power Density of a Cantilever Piezoelectric Power Harvester Through a Curved L-Shaped Proof Mass , 2010, IEEE Transactions on Industrial Electronics.

[23]  Seyedfakhreddin Nabavi,et al.  Nonlinear Multi-Mode Wideband Piezoelectric MEMS Vibration Energy Harvester , 2019, IEEE Sensors Journal.

[24]  H. Hida,et al.  Airflow energy harvester of piezoelectric thin-film bimorph using self-excited vibration , 2017 .

[25]  Sijun Du,et al.  Micromachined cantilevers-on-membrane topology for broadband vibration energy harvesting , 2016 .

[26]  Frederic Nabki,et al.  Effects of Proof Mass Geometry on Piezoelectric Vibration Energy Harvesters , 2018, Sensors.

[27]  Yu Jia,et al.  An Efficient SSHI Interface With Increased Input Range for Piezoelectric Energy Harvesting Under Variable Conditions , 2016, IEEE Journal of Solid-State Circuits.

[28]  Shao-Tuan Chen,et al.  Real-world evaluation of a self-startup SSHI rectifier for piezoelectric vibration energy harvesting , 2017 .

[29]  Xue Wang,et al.  Hybridized nanogenerator based on honeycomb-like three electrodes for efficient ocean wave energy harvesting , 2018 .

[30]  R Xu,et al.  Low-Frequency, Low-G MEMS Piezoelectric Energy Harvester , 2015 .

[31]  Lihong Zhang,et al.  Design and Optimization of Piezoelectric MEMS Vibration Energy Harvesters Based on Genetic Algorithm , 2017, IEEE Sensors Journal.

[32]  Lihong Zhang,et al.  Frequency Tuning and Efficiency Improvement of Piezoelectric MEMS Vibration Energy Harvesters , 2019, Journal of Microelectromechanical Systems.

[33]  Fei Wang,et al.  Micro electrostatic energy harvester with both broad bandwidth and high normalized power density , 2018 .

[34]  Dae-Yong Jeong,et al.  Ultra-Low Resonant Piezoelectric MEMS Energy Harvester With High Power Density , 2017, Journal of Microelectromechanical Systems.

[35]  V. Pop,et al.  Vacuum-packaged piezoelectric vibration energy harvesters: damping contributions and autonomy for a wireless sensor system , 2010 .

[36]  H. Wikle,et al.  The design, fabrication and evaluation of a MEMS PZT cantilever with an integrated Si proof mass for vibration energy harvesting , 2008 .

[37]  W. Thomson.  Theory of vibration with applications , 1965 .

[38]  Mohammed Ismail,et al.  An AC-DC converter for human body-based vibration energy harvesting , 2016, Microelectron. J..

[39]  Sanjib Kumar Panda,et al.  Optimized Wind Energy Harvesting System Using Resistance Emulator and Active Rectifier for Wireless Sensor Nodes , 2011, IEEE Transactions on Power Electronics.