论文信息 - HIGH-SPEED FORCE SENSOR FOR FORCE MICROSCOPY AND PROFILOMETRY UTILIZING A QUARTZ TUNING FORK

HIGH-SPEED FORCE SENSOR FOR FORCE MICROSCOPY AND PROFILOMETRY UTILIZING A QUARTZ TUNING FORK

Force sensors are key elements of atomic force microscopes and surface profilometers. Sensors with an integrated deflection meter are particularly desirable. Here, quartz tuning forks as used in watches are utilized as force sensors. A novel technique is employed which simplifies the interpretation of the data and increases the imaging speed by at least one order of magnitude compared to previous implementations. The variation of the imaging signal with distance fits well to a Hertzian contact model. Images of compact discs and calibration gratings, which have been obtained with scanning speeds up to 230 μm/s, are presented.

Franz J. Giessibl | F. Giessibl

[1] S. Kitamura,et al. Observation of 7×7 Reconstructed Structure on the Silicon (111) Surface using Ultrahigh Vacuum Noncontact Atomic Force Microscopy , 1995 .

[2] Hal Edwards,et al. Fast, high-resolution atomic force microscopy using a quartz tuning fork as actuator and sensor , 1997 .

[3] C. J. Chen,et al. Introduction to Scanning Tunneling Microscopy , 1993 .

[4] K. Dransfeld,et al. Scanning near-field acoustic microscopy , 1989 .

[5] P. Mårtensson,et al. Inequivalent atoms and imaging mechanisms in ac-mode atomic-force microscopy of Si(111)7 x 7. , 1996, Physical review. B, Condensed matter.

[6] Franz J. Giessibl,et al. Forces and frequency shifts in atomic-resolution dynamic-force microscopy , 1997 .

[7] D. Rugar,et al. Frequency modulation detection using high‐Q cantilevers for enhanced force microscope sensitivity , 1991 .

[8] T. Itoh,et al. Development of a force sensor for atomic force microscopy using piezoelectric thin films , 1993 .

[9] D. T. N. Williamson,et al. The Pattern of Batch Manufacture and Its Influence on Machine Tool Design , 1967 .

[10] C. Quate,et al. Atomic resolution with an atomic force microscope using piezoresistive detection , 1993 .

[11] P. Hössel,et al. Scanning Force Microscopy , 2019, CIRP Encyclopedia of Production Engineering.

[12] K. Karrai,et al. Piezoelectric tip‐sample distance control for near field optical microscopes , 1995 .