论文信息 - Si3N4 multilayer platform for photonic integrated circuits

Si3N4 multilayer platform for photonic integrated circuits

We design, fabricate, and demonstrate an optimized silicon nitride multilayer platform including ultra-low interlayer vertical coupling loss of 0.05 dB, multilayer crossing loss of 0.265 dB at 90° crossing angle, and 50 μm bending radius.

[1] Uziel Koren,et al. Semiconductor photonic integrated circuits , 1991, Integrated Photonics Research.

[2] A. Leinse,et al. Planar waveguides with less than 0.1 dB/m propagation loss fabricated with wafer bonding. , 2011, Optics express.

[3] J. Bowers,et al. Multilayer Platform for Ultra-Low-Loss Waveguide Applications , 2012, IEEE Photonics Technology Letters.

[4] Daniel J. Blumenthal,et al. Optical Interconnect for 3D Integration of Ultra-Low Loss Planar Lightwave Circuits , 2013 .