Design Space Reparameterization Enforces Hard Geometric Constraints in Inverse-Designed Nanophotonic Devices

Inverse design algorithms are the basis for realizing high-performance, freeform nanophotonic devices. Current methods to enforce geometric constraints, such as practical fabrication constraints, are heuristic and not robust. In this work, we show that hard geometric constraints can be imposed on inverse-designed devices by reparameterizing the design space itself. Instead of evaluating and modifying devices in the physical device space, candidate device layouts are defined in a constraint-free latent space and mathematically transformed to the physical device space, which robustly imposes geometric constraints. Modifications to the physical devices, specified by inverse design algorithms, are made to their latent space representations using backpropagation. As a proof-of-concept demonstration, we apply reparameterization to enforce strict minimum feature size constraints in local and global topology optimizers for metagratings. We anticipate that concepts in reparameterization will provide a general and meaningful platform to incorporate physics and physical constraints in any gradient-based optimizer, including machine learning-enabled global optimizers.

[1]  W. R. Frei,et al.  Geometry projection method for optimizing photonic nanostructures. , 2007, Optics letters.

[2]  F. Marty,et al.  Advanced etching of silicon based on deep reactive ion etching for silicon high aspect ratio microstructures and three-dimensional micro- and nanostructures , 2005, Microelectron. J..

[3]  Eli Yablonovitch,et al.  Adjoint shape optimization applied to electromagnetic design. , 2013, Optics express.

[4]  Jonathan A. Fan,et al.  Review of numerical optimization techniques for meta-device design [Invited] , 2019, Optical Materials Express.

[5]  Jianji Yang,et al.  Analysis of material selection on dielectric metasurface performance. , 2017, Optics express.

[6]  Martin A. Green,et al.  Self-consistent optical parameters of intrinsic silicon at 300 K including temperature coefficients , 2008 .

[7]  Walter J. Riker A Review of J , 2010 .

[8]  Lars Liebmann,et al.  TCAD development for lithography resolution enhancement , 2001, IBM J. Res. Dev..

[9]  Jianji Yang,et al.  High-efficiency, large-area, topology-optimized metasurfaces , 2019, Light: Science & Applications.

[10]  Jonathan A. Fan,et al.  Freeform metasurface design based on topology optimization , 2020, MRS Bulletin.

[11]  Jonathan A. Fan,et al.  Simulator-based training of generative neural networks for the inverse design of metasurfaces , 2019, Nanophotonics.

[12]  Jiaqi Jiang,et al.  Deep neural networks for the evaluation and design of photonic devices , 2020, Nature Reviews Materials.

[13]  Jacob Scheuer,et al.  Genetically optimized all-dielectric metasurfaces. , 2017, Optics express.

[14]  Ian A. D. Williamson,et al.  Forward-Mode Differentiation of Maxwell's Equations , 2019, ACS Photonics.

[15]  Zongfu Yu,et al.  Controlling the minimal feature sizes in adjoint optimization of nanophotonic devices using b-spline surfaces. , 2019, Optics express.

[16]  Christophe Vieu,et al.  Electron beam lithography: resolution limits and applications , 2000 .

[17]  O. Sigmund,et al.  Robust topology optimization accounting for spatially varying manufacturing errors , 2011 .

[18]  Dries Vercruysse,et al.  Analytical level set fabrication constraints for inverse design , 2019, Scientific Reports.

[19]  Guigang Zhang,et al.  Deep Learning , 2016, Int. J. Semantic Comput..

[20]  Jimmy Ba,et al.  Adam: A Method for Stochastic Optimization , 2014, ICLR.

[21]  Banqiu Wu,et al.  High aspect ratio silicon etch: A review , 2010 .

[22]  Jianji Yang,et al.  Topology-optimized metasurfaces: impact of initial geometric layout. , 2017, Optics letters.

[23]  Shanhui Fan,et al.  Adjoint Method and Inverse Design for Nonlinear Nanophotonic Devices , 2018, ACS Photonics.

[24]  T. Kenny,et al.  Ultra-high aspect ratio trenches in single crystal silicon with epitaxial gap tuning , 2013, 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII).

[25]  Ian A. D. Williamson,et al.  Inverse design of photonic crystals through automatic differentiation , 2020, ArXiv.

[26]  David Sell,et al.  Ultra-High-Efficiency Anomalous Refraction with Dielectric Metasurfaces , 2018 .

[27]  Eli Yablonovitch,et al.  Optical projection lithography at half the Rayleigh resolution limit by two-photon exposure , 1999 .

[28]  Steven G. Johnson,et al.  Inverse Designed Metalenses with Extended Depth of Focus , 2020, 2020 Conference on Lasers and Electro-Optics (CLEO).

[29]  Junghoon Yeom,et al.  Maximum achievable aspect ratio in deep reactive ion etching of silicon due to aspect ratio dependent transport and the microloading effect , 2005 .

[30]  O. Sigmund,et al.  Minimum length scale in topology optimization by geometric constraints , 2015 .

[31]  Dries Vercruysse,et al.  Fully-automated optimization of grating couplers. , 2017, Optics express.

[32]  Jakob S. Jensen,et al.  Topology optimization of photonic crystal structures: a high-bandwidth low-loss T-junction waveguide , 2005 .

[33]  D. Joy The spatial resolution limit of electron lithography , 1983 .

[34]  David Sell,et al.  Large-Angle, Multifunctional Metagratings Based on Freeform Multimode Geometries. , 2017, Nano letters.

[35]  Jiaqi Jiang,et al.  Robust Freeform Metasurface Design Based on Progressively Growing Generative Networks , 2020, ACS Photonics.

[36]  O. Miller,et al.  High-NA achromatic metalenses by inverse design. , 2019, Optics express.

[37]  B. Shen,et al.  An integrated-nanophotonics polarization beamsplitter with 2.4 × 2.4 μm2 footprint , 2015, Nature Photonics.

[38]  Jakob S. Jensen,et al.  Robust topology optimization of photonic crystal waveguides with tailored dispersion properties , 2011 .

[39]  Evan Wang,et al.  Robust Design for Topology Optimized Metasurfaces , 2018, 2018 Conference on Lasers and Electro-Optics (CLEO).

[40]  David Sell,et al.  Freeform Metagratings Based on Complex Light Scattering Dynamics for Extreme, High Efficiency Beam Steering , 2017, 1709.05019.

[41]  Jelena Vucković,et al.  Inverse design in nanophotonics , 2018, Nature Photonics.

[42]  Jie Huang,et al.  Implementation of on-chip multi-channel focusing wavelength demultiplexer with regularized digital metamaterials , 2019, 1909.11136.

[43]  Alexander Y. Piggott,et al.  Inverse design and demonstration of a compact and broadband on-chip wavelength demultiplexer , 2015, Nature Photonics.

[44]  Jonathan A. Fan,et al.  Global optimization of dielectric metasurfaces using a physics-driven neural network , 2019, Nano letters.

[45]  Natalia Gimelshein,et al.  PyTorch: An Imperative Style, High-Performance Deep Learning Library , 2019, NeurIPS.