论文信息 - Amorphous-Silicon Inter-Layer Grating Couplers With Metal Mirrors Toward 3-D Interconnection - 字舞流文

Amorphous-Silicon Inter-Layer Grating Couplers With Metal Mirrors Toward 3-D Interconnection

N. Nishiyama | S. Arai | T. Amemiya | Joonhyun Kang | Y. Atsumi | Y. Hayashi | Jun-ichi Suzuki | Y. Kuno